Semiconductor Measurement Technology : Workshop on Mass Flow Measurement and Control for the Semiconductor Industry

Scientists & engineers met to identify research & standards that will benefit users & manufacturers (mfrs.) of mass flow controllers (MFCs) & related equip. Most attendees represented companies closely associated with the semiconductor industry, including mfrs. of MFCs, of process tolls, & of semiconductor devices. They were asked to identify the tech. problems limiting the productivity of the U.S. semiconductor mfg. industry, & prioritize the ways these problems can be resolved. Topics: flow meter performance; standards & calibration; gas properties; & alternatives to thermal mass flow controllers. The attendees identified recommended tasks which will guide research on gas properties, flow standards, & flow measurement techniques. Ill.Berg, Robert F. is the author of 'Semiconductor Measurement Technology : Workshop on Mass Flow Measurement and Control for the Semiconductor Industry', published 2005 under ISBN 9780756746896 and ISBN 0756746892.