84201927

9783527675050

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications

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  • ISBN-13: 9783527675050
  • ISBN: 3527675051
  • Publisher: Wiley-vch

AUTHOR

Kockmann, Norbert, Brand, Oliver, Fedder, Gary K.

SUMMARY

Kockmann is the author of 'Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications' with ISBN 9783527675050 and ISBN 3527675051.

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