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9780521373760

Ion-Solid Interactions Fundamentals and Applications

Ion-Solid Interactions Fundamentals and Applications
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  • ISBN-13: 9780521373760
  • ISBN: 052137376X
  • Publication Date: 1996
  • Publisher: Cambridge Univ Pr

AUTHOR

Nastasi, Michael A., Mayer, James W., Hirvonen, James K.

SUMMARY

This book describes how materials, from semiconductors to tool steels, can be modified to create new materials. Its importance is that it is the first book in two decades to describe completely the implantation process which is used universally in semiconductor production.Nastasi, Michael A. is the author of 'Ion-Solid Interactions Fundamentals and Applications', published 1996 under ISBN 9780521373760 and ISBN 052137376X.

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