57117207

9781510607491

Advanced Etch Technology for Nanopatterning VI

Advanced Etch Technology for Nanopatterning VI

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  • ISBN-13: 9781510607491
  • ISBN: 1510607498
  • Publication Date: 2017
  • Publisher: SPIE

AUTHOR

Engelmann, Sebastian

SUMMARY

Engelmann, Sebastian is the author of 'Advanced Etch Technology for Nanopatterning VI', published 2017 under ISBN 9781510607491 and ISBN 1510607498.

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